Miniature capacitance diaphragm gauge for absolute
The capacitance diaphragm gauge with an overall size of 8 × 10 × 1.4 mm 3 was successfully fabricated, and its vacuum metrologies in rough and medium vacuum regime were evaluated systematically. The lower measurement limit of the gauge is 0.1 Pa, its maximum and minimum sensitivities in the range of 0.1 Pa to 84 kPa are 10.96 and 0.16 fF/Pa, …