Amorphous Silicon: The other Silicon
Structure of hydrogenated amorphous silicon [2]. Amorphous silicon (a-Si) was first intensively investigated in the 1970''s [1]. a-Si is used in devices typically deposited by plasma-enhanced chemical vapor deposition from silane at ~300 oC. Although a-Si has no long range order like a crystal, in device-grade a-Si most silicon atoms still ...